Title:
マスクパターン描画方法
Document Type and Number:
Japanese Patent JP5742388
Kind Code:
B2
Inventors:
Narukawa Shogo
Application Number:
JP2011079968A
Publication Date:
July 01, 2015
Filing Date:
March 31, 2011
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
G03F1/20; H01L21/027
Domestic Patent References:
| JP2004134447A | ||||
| JP2010040849A | ||||
| JP3015848A | ||||
| JP2266510A | ||||
| JP63232318A | ||||
| JP5326358A | ||||
| JP2003022967A |
Foreign References:
| US20120217421 | ||||
| WO2009125529A1 | ||||
| US6238850 |
Attorney, Agent or Firm:
Hiromi Fujimasu
Keiko Fukamachi
Hideo Ito
Naoki Goto
Yusuke Ito
Hideyuki Tateishi
Keiko Fukamachi
Hideo Ito
Naoki Goto
Yusuke Ito
Hideyuki Tateishi