Title:
塗布装置
Document Type and Number:
Japanese Patent JP5742429
Kind Code:
B2
Abstract:
An application apparatus includes: a piston including first and second plungers fixed to a shaft; a housing including a fill chamber having an outlet, a control chamber separated from the fill chamber by the first plunger, first and second adjustment chambers separated from each other by the second plunger, and a separation section that separates the control chamber and the first adjustment chamber, the shaft extending moveably through the separation section; a gas supply section to supply a gas into the control chamber, the first adjustment chamber, and the second adjustment chamber; a first valve to control release of the gas within the first adjustment chamber; a second valve to control release of the gas within the second adjustment chamber; and a control section to close the first and second valves and open the first valve to supply the gas into the control chamber and move the piston.
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Inventors:
Satoshi Kai
Application Number:
JP2011098528A
Publication Date:
July 01, 2015
Filing Date:
April 26, 2011
Export Citation:
Assignee:
富士通株式会社
International Classes:
B05C5/00
Domestic Patent References:
| JP2010534133A | ||||
| JP59027861U | ||||
| JP55032793A |
Foreign References:
| US5964381 |
Attorney, Agent or Firm:
Shuhei Katayama