Title:
コージェライト質セラミックスおよびこれを用いた半導体製造装置用部材
Document Type and Number:
Japanese Patent JP5744045
Kind Code:
B2
Abstract:
The present invention provides a cordierite ceramic having a small coefficient of thermal expansion and an excellent mechanical strength, and a member for semiconductor manufacture devices, which uses the cordierite ceramic. The cordierite ceramic contains a main component having a composition including Mg in an amount of 12.6% by mass or more and 14.0% by mass or less in terms of an oxide, Al in an amount of 33.4% by mass or more and 34.4% by mass or less in terms of an oxide and Si in an amount of 52.0% by mass or more and 53.6% by mass or less in terms of an oxide, and an accessory component, wherein the accessory component contains any one of Y, Yb, Er, and Ce in an amount of 4.5% by mass or more and 15.0% by mass or less in terms of an oxide based on 100% by mass of the main component, wherein cordierite, disilicate and spinel are present as crystal phases. The cordierite ceramic has a coefficient of thermal expansion ranging from -120 ppb/°C to +120 ppb/°C, a four-point bending strength of 170 MPa or more, a low thermal expansion performance and an excellent mechanical strength.
Inventors:
Shuichi Iida
Akio Fukui
Sue Toshiyuki
Akio Fukui
Sue Toshiyuki
Application Number:
JP2012540910A
Publication Date:
July 01, 2015
Filing Date:
October 26, 2011
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
C04B35/195; H01L21/205
Domestic Patent References:
| JP2003206177A | 2003-07-22 | |||
| JP2004203684A | 2004-07-22 | |||
| JP2008007341A | 2008-01-17 | |||
| JP2003206177A | 2003-07-22 | |||
| JP2004203684A | 2004-07-22 |