Title:
マイクロ構造体の製造方法
Document Type and Number:
Japanese Patent JP5744407
Kind Code:
B2
Inventors:
Seto Yutaka Tomoto
Takayuki Teshima
Takashi Nakamura
Takayuki Teshima
Takashi Nakamura
Application Number:
JP2010037922A
Publication Date:
July 08, 2015
Filing Date:
February 23, 2010
Export Citation:
Assignee:
Canon Inc
International Classes:
C25D1/00; G02B5/18
Domestic Patent References:
| JP2002313233A | ||||
| JP2006520697A | ||||
| JP2011157622A | ||||
| JP2011174119A |
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa