Title:
加熱励振を利用した熱伝導型気圧センサ
Document Type and Number:
Japanese Patent JP5745205
Kind Code:
B2
Abstract:
Disclosed is a heat conduction type barometric sensor (utilizing thermal excitation) for the measurement of a high bandwidth barometric pressure with high sensitivity and high accuracy that has simple structure and circuit configuration and can measure a barometric pressure in the range of a very low barometric pressure to 1 atm or higher using one sensor chip. The heat conduction type barometric sensor comprises a cantilever-shaped thin film 10 provided with a thin-film temperature sensor, a heating means, and an excitation means. The excitation means utilizes warpage and bending based on a difference in thermal expansion between two main layers constituting the thin film during intermittent heating by a thin-film heater as the heating means, and the two main layers are a silicon layer and a thermally oxidized film of silicon which are significantly different from each other In the coefficient of thermal expansion. A circuit in which the sensitivity is enhanced by the integration of a seebeck current for a predetermined period of time, and a cap which can suppress the influence of an air stream can be also provided.
Inventors:
Mitsuteru Kimura
Application Number:
JP2008214713A
Publication Date:
July 08, 2015
Filing Date:
August 22, 2008
Export Citation:
Assignee:
Mitsuteru Kimura
International Classes:
G01L21/12
Domestic Patent References:
| JP200751963A | ||||
| JP8122107A | ||||
| JP4304679A | ||||
| JP2008111822A | ||||
| JP2004286492A | ||||
| JP2006153782A |
Attorney, Agent or Firm:
Hisao Fukumori
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