Title:
波長可変干渉フィルター、光モジュール、及び電子機器
Document Type and Number:
Japanese Patent JP5747623
Kind Code:
B2
Inventors:
Yasushi Matsuno
Akira Sano
Akira Sano
Application Number:
JP2011087226A
Publication Date:
July 15, 2015
Filing Date:
April 11, 2011
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G02B26/00; B81B3/00; G01J3/46; G02B5/28
Domestic Patent References:
| JP2001221913A | ||||
| JP2011027780A | ||||
| JP2006235606A | ||||
| JP2011008225A | ||||
| JP2006208791A | ||||
| JP2005202266A | ||||
| JP2011195189A | ||||
| JP2004212680A |
Foreign References:
| US20070242920 |
Attorney, Agent or Firm:
Intellectual Property Office