Title:
光ナノインプリント用硬化性組成物および硬化性組成物から得られた硬化膜
Document Type and Number:
Japanese Patent JP5751055
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To solve such problems that a hardened film exhibiting high adhesion to glass and metal is needed, a hardened film formed in a semiconductor integrated circuit and capable of preventing the blistering or peeling on the substrate interface when heated is needed, and reduction in labor and time required for formation of a protective film and reduction of consumables are needed in the manufacturing of a semiconductor integrated circuit.SOLUTION: The curable composition for optical nanoimprint contains (A) a compound having phosphate ester, (B) a silane coupling agent, (C) a radical polymerizable monomer having a hydroxy group, (D) a photoinitiator, (E) a radical polymerizable monomer other than (C) a radical polymerizable monomer having a hydroxy group, and (F) a surfactant.
Inventors:
Yuki Okamoto
Yoshitaka Kobayashi
Tomohiro Egashira
Yoshitaka Kobayashi
Tomohiro Egashira
Application Number:
JP2011155394A
Publication Date:
July 22, 2015
Filing Date:
July 14, 2011
Export Citation:
Assignee:
JNC Corporation
International Classes:
H01L21/027; B29C59/02; C08F2/50; C08F220/28
Domestic Patent References:
| JP2008105414A | ||||
| JP10511992A | ||||
| JP2010219458A | ||||
| JP2009051017A | ||||
| JP2010157613A | ||||
| JP2008142940A |
Foreign References:
| WO2007074782A1 | ||||
| WO2011052161A1 |