Title:
トリクロロシラン製造方法
Document Type and Number:
Japanese Patent JP5754499
Kind Code:
B2
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Inventors:
Toshiyuki Ishii
Eiji Komai
Harumi Sato
Eiji Komai
Harumi Sato
Application Number:
JP2013255705A
Publication Date:
July 29, 2015
Filing Date:
December 11, 2013
Export Citation:
Assignee:
Mitsubishi Materials Corporation
International Classes:
C01B33/107
Domestic Patent References:
| JP2009227577A | ||||
| JP2009007240A | ||||
| JP2009062210A | ||||
| JP7081920A | ||||
| JP2009528252A |
Attorney, Agent or Firm:
Masakazu Aoyama