Title:
真空洗浄装置
Document Type and Number:
Japanese Patent JP5756072
Kind Code:
B2
Inventors:
Jun Hirata
Kazuo Miyoshi
Hiramoto
Yoshiyasu Matsuda
Kazuo Miyoshi
Hiramoto
Yoshiyasu Matsuda
Application Number:
JP2012221960A
Publication Date:
July 29, 2015
Filing Date:
October 04, 2012
Export Citation:
Assignee:
Ihi Co., Ltd.
Ihi Mechanical Systems Co., Ltd.
Ihi Mechanical Systems Co., Ltd.
International Classes:
B08B3/08
Domestic Patent References:
| JP64018483A | ||||
| JP8252546A | ||||
| JP2010234193A | ||||
| JP2009119392A | ||||
| JP10071370A | ||||
| JP2100682U | ||||
| JP59089100U |
Attorney, Agent or Firm:
Aomi patent office
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