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Title:
ガスバリア性フィルムの製造装置及びガスバリア性フィルム
Document Type and Number:
Japanese Patent JP5760284
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a laminated body consisting of an organic thin film and an inorganic thin film laminated in a vacuum, wherein the entry of foreign matter into the organic thin film is controlled.SOLUTION: Provided are the manufacturing method of organic thin film characterized by polymerizing an ionic liquid monomer in vacuum to form the film; and the laminated body 1 characterized by lamination of the organic thin film 13 obtained by such a method and inorganic thin film layers (a first inorganic thin film layer 12 and a second inorganic film layer 14).

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Inventors:
Yanagawa Masao
Taichi Senda
Toshiya Kuroda
Kazufumi Watanabe
Application Number:
JP2011121854A
Publication Date:
August 05, 2015
Filing Date:
May 31, 2011
Export Citation:
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Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
B32B9/00
Domestic Patent References:
JP2009066986A
JP2005169267A
JP2004524958A
JP2005082737A
JP2003165175A
JP2005264135A
JP2009525396A
Foreign References:
WO2012136529A1
Attorney, Agent or Firm:
Sumio Tanai
Naozumi Hiroyasu
Norihiko Ara
Hiroyuki Kato
Mitsunaga Igarashi



 
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