Title:
物理量検出装置および電子機器
Document Type and Number:
Japanese Patent JP5760652
Kind Code:
B2
Inventors:
Toshiyuki Nozawa
Application Number:
JP2011100840A
Publication Date:
August 12, 2015
Filing Date:
April 28, 2011
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G01P15/125; G01C19/5726; H01L29/84
Domestic Patent References:
| JP2000065664A | ||||
| JP59168168U | ||||
| JP55110961A | ||||
| JP2010190758A | ||||
| JP2005535900A | ||||
| JP4329371A | ||||
| JP8122180A | ||||
| JP8327677A |
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Osamu Suzawa