Title:
磁気軸受の制御装置と該装置を備えた排気ポンプ
Document Type and Number:
Japanese Patent JP5764141
Kind Code:
B2
Abstract:
To provide a magnetic bearing control device that identifies a movable range of an eddy current gap sensor configuring a magnetic bearing and a center of the movable range and easily controls a rotor shaft and other controlled shafts, which are lifted by the magnetic bearing, in a central position of a protective bearing. The magnetic bearing control device has a first function for detecting an X-axis direction movable limit position of the rotor shaft; a second function for identifying a center of an X-axis movable range of an X-axis eddy current gap sensor (-X sensor, +X sensor) based on the X-axis direction movable limit position detected by the first function; a third function for detecting a Y-axis direction movable limit position of the rotor shaft; a fourth function for identifying a center of a Y-axis movable range of a Y-axis eddy current gap sensor (+Y sensor, -Y sensor) based on the Y-axis direction movable limit position detected by the third function; and a fifth function for turning an excitation current of a Y-axis electromagnet (+Y electromagnet, -Y electromagnet) OFF when the first function detects the X-axis direction movable limit position and the second function identifies the center of the X-axis movable range, and turning an excitation current of an X-axis electromagnet (+X electromagnet, -X electromagnet) OFF when the third function detects the Y-axis direction movable limit position and the fourth function identifies the center of the Y-axis movable rage.
Inventors:
Hideki Omori
Application Number:
JP2012545633A
Publication Date:
August 12, 2015
Filing Date:
July 21, 2011
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
F16C32/04; F04D19/04; F04D27/00
Domestic Patent References:
| JPH11166532A | 1999-06-22 |
Attorney, Agent or Firm:
Shigenori Wada