Title:
スパッタ装置、ターゲット装置
Document Type and Number:
Japanese Patent JP5764467
Kind Code:
B2
Inventors:
Harunori Iwai
Susumu Ikeda
Kubo Shoji
Susumu Ikeda
Kubo Shoji
Application Number:
JP2011243657A
Publication Date:
August 19, 2015
Filing Date:
November 07, 2011
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
C23C14/34
Domestic Patent References:
| JP2005520935A | ||||
| JP6503855A | ||||
| JP2003268538A |
Foreign References:
| US20050178662 | ||||
| US20100243428 | ||||
| US5725746 | ||||
| US20030173217 |
Attorney, Agent or Firm:
Shigeo Ishijima
Hideki Abe
Hideki Abe