Title:
表面波プラズマＣＶＤ装置および成膜方法
Document Type and Number:
Japanese Patent JP5765353
Kind Code:
B2
Inventors:
Masayasu Suzuki
Application Number:
JP2013043736A
Publication Date:
August 19, 2015
Filing Date:
March 06, 2013
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
C23C16/511; H01L21/31; H05H1/46
Domestic Patent References:
| JP2006312778A | ||||
| JP2008153007A | ||||
| JP2006286883A | ||||
| JP2007317499A |
Foreign References:
| WO2010131365A1 |
Attorney, Agent or Firm:
Toshifumi Kita
Hiroyuki Eguchi
Hiroyuki Eguchi