Title:
保持装置、露光装置、露光方法、及びデバイス製造方法
Document Type and Number:
Japanese Patent JP5768793
Kind Code:
B2
Abstract:
A holding apparatus is provided with a holding member that has a holding surface that holds a substrate on which a pattern is to be formed, a plurality of first electrode members that are provided on the holding member and that generate electrostatic force in accordance with supplied voltage in order to attract the substrate to the holding surface, and a power supply device that is able to supply voltage to the first electrode members. The first electrode members are positioned in accordance with pattern information.
Inventors:
Ichi Yamamoto
Application Number:
JP2012219915A
Publication Date:
August 26, 2015
Filing Date:
October 01, 2012
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; B23Q3/15; H01L21/683; H02N13/00
Domestic Patent References:
| JP2004006706A | ||||
| JP2005116849A | ||||
| JP2004327875A | ||||
| JP2001291763A | ||||
| JP2003142568A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Tadashi Takahashi