Title:
マイクロポンプ用の可撓性エレメント
Document Type and Number:
Japanese Patent JP5778169
Kind Code:
B2
Abstract:
The micro-pump has a pumping chamber (4) communicating with exterior via a flexible diaphragm (2). The diaphragm is secured to an actuator (5) e.g. piezoelectric bi-morph or multi-morph actuator or shape memory alloy actuator, arranged at the exterior of the micro-pump. The diaphragm is secured to the actuator by an element that is in the form of a strip (6), which is rigid along its main axis and flexible in the direction perpendicular to the main axis, where the strip is made of stainless steel. The actuator has a fixed end (8) fixed on a rigid support plate (11) that is made of ceramic.
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Inventors:
Nicklaus Schneberger
Eric Chapel
Eric Chapel
Application Number:
JP2012542648A
Publication Date:
September 16, 2015
Filing Date:
November 19, 2010
Export Citation:
Assignee:
Debiotech Society Anonym
International Classes:
F04B43/02; F04B43/04
Domestic Patent References:
| JP8042457A | ||||
| JP2007278236A | ||||
| JP60035191A | ||||
| JP2001507425A | ||||
| JP9507279A | ||||
| JP9512075A | ||||
| JP2005084166A | ||||
| JP2003145751A | ||||
| JP2009108715A |
Attorney, Agent or Firm:
Junji Yuda
Noriyuki Takebayashi
Noriyuki Takebayashi