Title:
光学素子操作装置
Document Type and Number:
Japanese Patent JP5779545
Kind Code:
B2
Abstract:
The invention relates to an apparatus for manipulation of an optical element (7) in up to six degrees of freedom with respect to a structure (8) via at least three actuator devices (9). The actuator devices (9) each have at least two force-controlled actuators, which each produce an effective force along one degree of freedom, with linking points (11) of the actuator devices (9) acting directly on the optical element (7).
Inventors:
Mule Bayer Michael
Lippert Johannes
Lippert Johannes
Application Number:
JP2012113006A
Publication Date:
September 16, 2015
Filing Date:
May 17, 2012
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
G03F7/20; G02B7/182; G02B26/08; G02B27/18
Domestic Patent References:
| JP2002131605A | ||||
| JP11274031A | ||||
| JP2003203860A | ||||
| JP2002501222A | ||||
| JP2002359170A | ||||
| JP2003188066A | ||||
| JP2005072221A | ||||
| JP2005064474A | ||||
| JP2004281644A | ||||
| JP2007505345A |
Attorney, Agent or Firm:
Kenji Sugimura
Tatsuya Sawada
Groundwork Kenichi
Tatsuya Sawada
Groundwork Kenichi