Title:
窒化物半導体発光素子を作製する方法
Document Type and Number:
Japanese Patent JP5786548
Kind Code:
B2
Inventors:
Nobuhiro Saga
Shinji Tokuyama
Kazuhide Sumiyoshi
Koji Katayama
Takatoshi Ikegami
Shinji Tokuyama
Kazuhide Sumiyoshi
Koji Katayama
Takatoshi Ikegami
Application Number:
JP2011177725A
Publication Date:
September 30, 2015
Filing Date:
August 15, 2011
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
H01S5/343; H01S5/22
Domestic Patent References:
| JP2010199237A | ||||
| JP2004335763A | ||||
| JP2010205829A | ||||
| JP2004289149A | ||||
| JP63170925A | ||||
| JP2003257939A | ||||
| JP2011138891A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Ichira Kondo
Yoshiki Kuroki
Ichira Kondo