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Patent Searching and Data


Title:
塩及びレジスト組成物
Document Type and Number:
Japanese Patent JP5793833
Kind Code:
B2
Inventors:
市川 幸司
杉原 昌子
坂本 宏
Application Number:
JP2010158480A
Publication Date:
October 14, 2015
Filing Date:
July 13, 2010
Export Citation:
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Assignee:
住友化学株式会社
International Classes:
C07D317/72; C07D339/06; G03F7/004; G03F7/039; H01L21/027
Domestic Patent References:
JP2009046479A
JP2010134279A
JP2004004561A
JP2006257078A
Attorney, Agent or Firm:
中山 亨
坂元 徹