Title:
露光装置及び露光方法、並びにデバイス製造方法
Document Type and Number:
Japanese Patent JP5800257
Kind Code:
B2
Inventors:
Yuichi Shibasaki
Application Number:
JP2014147302A
Publication Date:
October 28, 2015
Filing Date:
July 18, 2014
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; H01L21/683
Domestic Patent References:
| JP2001345248A | ||||
| JP2006114650A | ||||
| JP2004134567A | ||||
| JP2001358056A | ||||
| JP2006120774A | ||||
| JP2005191166A | ||||
| JP2006086448A | ||||
| JP2005079294A |
Foreign References:
| WO2004073053A1 |
Attorney, Agent or Firm:
Atsushi Tateishi