Title:
成膜装置
Document Type and Number:
Japanese Patent JP5801253
Kind Code:
B2
Inventors:
Miyashita Dai
Application Number:
JP2012121079A
Publication Date:
October 28, 2015
Filing Date:
May 28, 2012
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
C23C14/32
Domestic Patent References:
| JP2010180469A | ||||
| JP2011077340A | ||||
| JP2003318115A |
Foreign References:
| EP1531490A1 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Yoshiki Kuroki