Title:
二成分エッチング
Document Type and Number:
Japanese Patent JP5801798
Kind Code:
B2
Abstract:
The object of the present invention is a new inkjet printable etching composition comprising an etchant, which is activated by a second component. Thus, a further object is the use of this new composition in a process for the etching of surfaces semiconductor devices or surfaces of solar cell devices.
Inventors:
Dollar, oliver
Plummer, Edward
James, Mark
Koehler, Ingo
Plummer, Edward
James, Mark
Koehler, Ingo
Application Number:
JP2012513486A
Publication Date:
October 28, 2015
Filing Date:
May 12, 2010
Export Citation:
Assignee:
Merck Patent Gesellschaft mit beschraenkter Haftung
International Classes:
H01L21/306
Domestic Patent References:
| JP2003531807A | ||||
| JP2007527429A | ||||
| JP2009088098A | ||||
| JP2005537680A | ||||
| JP2008527698A | ||||
| JP2004512642A |
Foreign References:
| WO2005036268A1 | ||||
| WO1997002958A1 |
Attorney, Agent or Firm:
Kiyoji Kuzuwa
Ayako Matsuura
Ayako Matsuura