Title:
磁気ベアリング、回転段及び反射型電子ビームリソグラフィ装置
Document Type and Number:
Japanese Patent JP5802196
Kind Code:
B2
Abstract:
A magnetic bearing with an axis of rotation, wherein the magnetic bearing comprises:
- a cylindrical rotor comprising a ferromagnetic material, wherein the cylindrical rotor has an axis of symmetry, wherein the cylindrical rotor has an inner radius, wherein the cylindrical rotor has a top side,
- a static hub, wherein the static hub has an overhang which protrudes from the static hub and is located adjacent to the top side,
- a lift magnetic actuator apparatus for controlling the distance between the first surface and the overhang,
- a radial magnetic actuator apparatus for controlling the distance between the inner radius and the axis of rotation.
Inventors:
Sahin Nomarel Funda
Bustlan Klein F
Seichel Olaf Jay
Post justus bee
Bustlan Klein F
Seichel Olaf Jay
Post justus bee
Application Number:
JP2012506610A
Publication Date:
October 28, 2015
Filing Date:
April 14, 2010
Export Citation:
Assignee:
KONINKLIJKE PHILIPS N.V.
International Classes:
F16C32/04; G03F7/20
Domestic Patent References:
| JP59219521A | ||||
| JP2003102145A | ||||
| JP7208470A | ||||
| JP2007316132A | ||||
| JP2003013955A |
Attorney, Agent or Firm:
Susumu Tsugaru
Fueda Shusen
Takahiro Igarashi
Fueda Shusen
Takahiro Igarashi