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Patent Searching and Data


Title:
可動基板上に過渡熱プロファイル処理を提供するための装置
Document Type and Number:
Japanese Patent JP5802739
Kind Code:
B2
Abstract:
An apparatus for curing thin films is disclosed. The apparatus includes a computer control system, a conveyance system, a flashlamp controller, and a flashlamp. The curing apparatus also includes a high average power, low-inductance cable connected between the flashlamp controller and the flashlamp. The low-inductance cable is smaller in diameter and is more flexible than the prior art and includes at least one liquid cooling line and multiple forward and return path wires interleaved in a regular hexagonal closed packed configuration such that every wire is adjacent to at least one cooling line and at least one wire of opposite polarity.

Inventors:
Schroeder, Kurt A.
McCool, Stephen Sea.
Jackson, Douglas K.
Application Number:
JP2013503973A
Publication Date:
November 04, 2015
Filing Date:
April 08, 2011
Export Citation:
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Assignee:
NC Nano, LLC
International Classes:
F26B13/10; B05C9/14; F26B3/28; F26B23/04
Domestic Patent References:
JP2009164201A
JP2009277759A
JP63126579A
JP2008128567A
JP2002536174A
JP2006255661A
Foreign References:
US20100007285
US3732011
WO2009131490A2
US20090181184
Attorney, Agent or Firm:
Shusaku Yamamoto
Takamura Yasumura
Morishita Natsuki