Title:
コラート光酸発生剤およびこれを含むフォトレジスト
Document Type and Number:
Japanese Patent JP5809798
Kind Code:
B2
Abstract:
New photoacid generator compounds ("PAGs") are provided that comprise a cholate moiety and photoresist compositions that comprise such PAG compounds.
Inventors:
Imad Acad
Minki Lee
Joseph Mattia
Minki Lee
Joseph Mattia
Application Number:
JP2010275276A
Publication Date:
November 11, 2015
Filing Date:
December 10, 2010
Export Citation:
Assignee:
Rohm and Haas Electronic Materials LLC
International Classes:
C07C309/12; C07C381/12; C09K3/00; G03F7/004; G03F7/039; H01L21/027
Domestic Patent References:
| JP2007161707A | ||||
| JP2009080474A | ||||
| JP2009269953A |
Foreign References:
| US3743660 |
Attorney, Agent or Firm:
Patent Business Corporation Sender International Patent Office