Title:
プラズマ処理装置及び基材の表面処理方法
Document Type and Number:
Japanese Patent JP5810462
Kind Code:
B2
Inventors:
Yukio Ide
Yuji Honda
Yuji Honda
Application Number:
JP2011159917A
Publication Date:
November 11, 2015
Filing Date:
July 21, 2011
Export Citation:
Assignee:
Yamaguchi Prefectural Industrial Technology Center
U-Tech Co., Ltd.
U-Tech Co., Ltd.
International Classes:
C23G3/00; C23C16/02; C23C16/56; H05H1/46
Domestic Patent References:
| JP5337705A | ||||
| JP11302846A | ||||
| JP7074159A | ||||
| JP2002309370A | ||||
| JP11209886A | ||||
| JP7118850A | ||||
| JP2006169589A | ||||
| JP62158859A | ||||
| JP2005002432A |
Foreign References:
| WO2003071839A1 |
Attorney, Agent or Firm:
Mutsumi Yanase