Title:
めっき処理装置、めっき処理方法および記憶媒体
Document Type and Number:
Japanese Patent JP5815827
Kind Code:
B2
Inventors:
Yuichiro Inatomi
Takashi Tanaka
Mitsuaki Iwashita
Takashi Tanaka
Mitsuaki Iwashita
Application Number:
JP2014209163A
Publication Date:
November 17, 2015
Filing Date:
October 10, 2014
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
C23C18/31; H01L21/288
Domestic Patent References:
| JP2009249679A | ||||
| JP2010024496A | ||||
| JP2005194613A |
Foreign References:
| WO2008001697A1 |
Attorney, Agent or Firm:
Hirohito Katsunuma
Hiroyuki Nagai
Hideyuki Mori
Kazuo Okamura
Hiroyuki Nagai
Hideyuki Mori
Kazuo Okamura