Title:
シリコン単結晶の製造方法
Document Type and Number:
Japanese Patent JP5819185
Kind Code:
B2
Inventors:
Toshiro Minami
Mikaro Hikasa
Kashima one day child
Mikaro Hikasa
Kashima one day child
Application Number:
JP2011290202A
Publication Date:
November 18, 2015
Filing Date:
December 29, 2011
Export Citation:
Assignee:
Global Wafers Japan Co., Ltd.
International Classes:
C30B29/06; C30B15/00
Domestic Patent References:
| JP2001106593A | ||||
| JP2008063165A |
Foreign References:
| WO2003091483A1 |
Attorney, Agent or Firm:
Kinoshita Shigeru