Title:
載置台の振動抑制装置及び載置台の振動抑制方法
Document Type and Number:
Japanese Patent JP5820621
Kind Code:
B2
Abstract:
The vibration of a mounting table caused by equipment mounted on the mounting table being moved is suppressed. A vibration suppression device (10) is provided with a fixing member (14). The fixing member (14) is affixed to a mounting table (12) mounted with equipment and supported by a mount by means of a vibration absorption means. The fixing member (14) has a flat center section (14C) and is affixed to the mounting table (12) by means of perpendicular sections (14E) formed by bending both ends of center section (14C). A clamping means (54) is disposed on both ends of center section (14C). The clamping means (54) has an upper leaf spring (20) and a lower leaf spring (22). The upper leaf spring (20) is affixed to center section (18C) of an upper leaf spring attachment base (18), and the lower leaf spring (22) is attached to an attachment base (17) disposed on the mount. Center section (18C) is inserted into a space surrounded by the fixing member (14) and the mounting table (12) and is attached to the attachment base (17) by means of leg sections formed by bending both ends of center section (18C). An actuator (24) for transforming the lower leaf spring (22) is attached to the lower leaf spring (22).
Inventors:
Hitoshi Matsushita
Hirokazu Yoshioka
Yoshinori Takahashi
Hirokazu Yoshioka
Yoshinori Takahashi
Application Number:
JP2011119198A
Publication Date:
November 24, 2015
Filing Date:
May 27, 2011
Export Citation:
Assignee:
TAKENAKA CORPORATION
International Classes:
F16F15/02; H01L21/027; H01L41/08; H01L41/09; H01L41/187
Domestic Patent References:
| JP10169702A | ||||
| JP4019438A | ||||
| JP2005166996A |
Foreign References:
| US7637359 |
Attorney, Agent or Firm:
Atsushi Nakajima
Kato Kazunori
Hiroshi Fukuda
Kato Kazunori
Hiroshi Fukuda