ナノインプリントリソグラフィ用モールド

Title:

ナノインプリントリソグラフィ用モールド

Document Type and Number:

Japanese Patent JP5821409

Kind Code:

B2

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Inventors:

Koji Yoshida
Rinko Yamada
Yuki Arizuka
Koji Ichimura
Masaaki Kurihara

Application Number:

JP2011182425A

Publication Date:

November 24, 2015

Filing Date:

August 24, 2011

Export Citation:

Assignee:

Dai Nippon Printing Co.,Ltd.

International Classes:

H01L21/027; B29C59/02

Domestic Patent References:

Attorney, Agent or Firm:

Hiromi Fujimasu
Keiko Fukamachi
Hideo Ito
Naoki Goto
Yusuke Ito
Hideyuki Tateishi

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