Title:
把持装置、搬送装置、処理装置、および電子デバイスの製造方法
Document Type and Number:
Japanese Patent JP5823742
Kind Code:
B2
Inventors:
Masaaki Furuya
Application Number:
JP2011134501A
Publication Date:
November 25, 2015
Filing Date:
June 16, 2011
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
B25J15/08; H01L21/677
Domestic Patent References:
| JP52095470A | ||||
| JP2004327970A | ||||
| JP50109377U | ||||
| JP2009099845A | ||||
| JP40008199B1 | ||||
| JP52155763A | ||||
| JP7052073A |
Foreign References:
| US5895084 | ||||
| US20050129496 | ||||
| WO1992010111A1 | ||||
| US20020084564 |
Attorney, Agent or Firm:
Masahiko Hinataji
Hiroshi Ichikawa
Soichi Homma
Yukinobu Hibino
Hiroshi Ichikawa
Soichi Homma
Yukinobu Hibino