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Patent Searching and Data


Title:
真空アーク炉における電極ギャップの閉ループ制御のための方法および装置
Document Type and Number:
Japanese Patent JP5824521
Kind Code:
B2
Inventors:
Ralph
Holz, holz
Hoffman, Frank-Berner
Application Number:
JP2013534244A
Publication Date:
November 25, 2015
Filing Date:
October 06, 2011
Export Citation:
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Assignee:
ALD Vacuum Technologies GmbH
International Classes:
H05B7/148; F27D11/08
Domestic Patent References:
JP8069877A
JP63502785A
JP2054892A
JP7022174A
JP2683372B2
JP6325867A
JP5230559A
JP2014500938A
Foreign References:
US4578795
US4881239
US5708677
US6115404
DE3544005A1
Attorney, Agent or Firm:
Fukami patent office