Title:
真空アーク炉における電極ギャップの閉ループ制御のための方法および装置
Document Type and Number:
Japanese Patent JP5824521
Kind Code:
B2
Inventors:
Ralph
Holz, holz
Hoffman, Frank-Berner
Holz, holz
Hoffman, Frank-Berner
Application Number:
JP2013534244A
Publication Date:
November 25, 2015
Filing Date:
October 06, 2011
Export Citation:
Assignee:
ALD Vacuum Technologies GmbH
International Classes:
H05B7/148; F27D11/08
Domestic Patent References:
| JP8069877A | ||||
| JP63502785A | ||||
| JP2054892A | ||||
| JP7022174A | ||||
| JP2683372B2 | ||||
| JP6325867A | ||||
| JP5230559A | ||||
| JP2014500938A |
Foreign References:
| US4578795 | ||||
| US4881239 | ||||
| US5708677 | ||||
| US6115404 | ||||
| DE3544005A1 |
Attorney, Agent or Firm:
Fukami patent office