自立膜、自立構造体、自立膜の製造方法及びペリクル

Japanese Patent JP5827217

B2

Provided is a self-supporting film that has an anti-reflection function independently, so that the self-supporting film exhibits excellent optical characteristics as a result. A self-supporting film has a rugged-structure layer having periodic rugged shapes formed on a surface thereof, with these periodic rugged shapes being formed on at least one surface. The average thickness of the self-supporting film ranges from 0.2 µm to 20.0 µm. The rugged-structure layer has a yield strain of 1% or greater and a tensile elongation of 10% or greater.

Seitaro Doi
Kenichiro Iwamura
Takuji Ikutame

JP2012510678A

December 02, 2015

April 13, 2011

Click for automatic bibliography generation  

Asahi Kasei E-materials Co., Ltd.

G03F1/62; G02B1/11

JP2003090902A	2003-03-28
JP2007264613A	2007-10-11
JP2009071024A	2009-04-02
JP2010504392A	2010-02-12
JP2010038924A	2010-02-18
JP2003139906A	2003-05-14
JP2005144699A	2005-06-09
JPS58219023A	1983-12-20
JPS6327707B2	1988-06-03
JP2001264520A	2001-09-26
JP2004157229A	2004-06-03
JP2008116979A	2008-05-22
JP2001264520A	2001-09-26
JP2004157229A	2004-06-03
JP2008116979A	2008-05-22
JP2003090902A	2003-03-28
JP2007264613A	2007-10-11
JP2009071024A	2009-04-02
JP2010504392A	2010-02-12
JP2010038924A	2010-02-18
JP2003139906A	2003-05-14
JP2005144699A	2005-06-09
JPS58219023A	1983-12-20
JPS6327707B2	1988-06-03

WO2010001492A1	2010-01-07
WO2007034715A1	2007-03-29
WO2007088862A1	2007-08-09
WO2010029997A1	2010-03-18
WO2007034715A1	2007-03-29
WO2007088862A1	2007-08-09
WO2010029997A1	2010-03-18
WO2010001492A1	2010-01-07

Yoshiki Hasegawa
Yoshinori Shimizu
Hiroyuki Nishimoto
Osaka Koichi
Hiroto Kido
Masato Ikeda

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