Title:
膜型圧電／電歪素子およびその製造方法
Document Type and Number:
Japanese Patent JP5827866
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a film-type piezoelectric/electrostrictive element, and a method for making the same, in which particle growth of a metal constituting an electrode film is suppressed, adhesiveness of the electrode film, as thin as less than 2 μm, to a base portion is maintained, thus adhesiveness between an operation portion and the base portion is high, and a displacement amount is assured, even when thermally treated at or higher than a particle growth starting temperature of the metal constituting the electrode film.SOLUTION: A film-type piezoelectric/electrostrictive element comprises: a ceramic substrate 3; an electrode film 7, having a thickness of less than 2 μm, which includes a matrix metal containing at least one of metals selected from the group consisting of Pt, Pd, Ru, Rh, Os, and Ir as a primary component and ceramic fine particles; and a piezoelectric/electrostrictive film 8.
Inventors:
Takai Koizumi
Naoki Ogawa
Morishita Eibun
Naoki Ogawa
Morishita Eibun
Application Number:
JP2011230826A
Publication Date:
December 02, 2015
Filing Date:
October 20, 2011
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
H01L41/29; H01L41/047; H01L41/09; H01L41/43
Domestic Patent References:
| JP9250936A | ||||
| JP2005244091A | ||||
| JP2003152235A | ||||
| JP7018455A | ||||
| JP2004071238A | ||||
| JP6318745A | ||||
| JP2001024245A | ||||
| JP2003258328A | ||||
| JP4021787A | ||||
| JP56058994A |
Attorney, Agent or Firm:
Shinki Global IP Patent Corporation