Title:
化学増幅型フォトレジスト組成物
Document Type and Number:
Japanese Patent JP5829795
Kind Code:
B2
Inventors:
Koji Ichikawa
Masako Sugihara
Masako Sugihara
Application Number:
JP2010069580A
Publication Date:
December 09, 2015
Filing Date:
March 25, 2010
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
G03F7/039; C07C309/12; C07C309/17; C07C381/12; C07D307/00; C08F20/28; C08K5/41; C08L33/14; C09K3/00; G03F7/004; G03F7/38
Domestic Patent References:
| JP200831298A | ||||
| JP200636891A | ||||
| JP2005326609A | ||||
| JP2000159758A | ||||
| JP2007153982A | ||||
| JP2003345023A | ||||
| JP2008287284A | ||||
| JP2008169340A | ||||
| JP20058531A | ||||
| JP2008165218A | ||||
| JP2008209917A | ||||
| JP2010266842A | ||||
| JP2009242789A |
Foreign References:
| WO2007094474A1 |
Attorney, Agent or Firm:
Shinki Global IP Patent Corporation