Title:
洗浄方法及び洗浄システム
Document Type and Number:
Japanese Patent JP5832178
Kind Code:
B2
Inventors:
Tomotaka Hashimoto
Keitaro Suzumura
Keitaro Suzumura
Application Number:
JP2011153880A
Publication Date:
December 16, 2015
Filing Date:
July 12, 2011
Export Citation:
Assignee:
Asahi Kasei Chemicals Corporation
International Classes:
B01D65/06
Domestic Patent References:
| JP11300384A | ||||
| JP2001038176A | ||||
| JP2006204996A | ||||
| JP2011083656A | ||||
| JP7256253A | ||||
| JP2002028453A | ||||
| JP2010253355A |
Foreign References:
| US20110067737 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshinori Shimizu
Hiroyuki Nishimoto
Yoshinori Shimizu
Hiroyuki Nishimoto