Title:
照明光学装置、照明方法、並びに露光方法及び装置
Document Type and Number:
Japanese Patent JP5842615
Kind Code:
B2
Abstract:
According to one embodiment, an illumination optical apparatus comprises: a light splitting device which splits the beam into a plurality of beams with respective polarization states different from each other; a spatial light modulation device which is arranged on at least one of a first optical path in which a first beam out of the plurality of beams travels and a second optical path in which a second beam out of the plurality of beams travels, and which has a plurality of optical elements arranged two-dimensionally and driven individually; and a control device which controls the spatial modulation device to combine the first beam and the second beam at least in part.
Inventors:
Toru Fujii
Application Number:
JP2011552808A
Publication Date:
January 13, 2016
Filing Date:
February 02, 2011
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; G02B19/00
Domestic Patent References:
| JP2002353105A | 2002-12-06 | |||
| JP2009105396A | 2009-05-14 | |||
| JP2002353105A | 2002-12-06 |
Foreign References:
| WO2009150871A1 | 2009-12-17 | |||
| WO2009125511A1 | 2009-10-15 | |||
| WO2009087805A1 | 2009-07-16 | |||
| WO2009150871A1 | 2009-12-17 | |||
| WO2009125511A1 | 2009-10-15 | |||
| WO2009087805A1 | 2009-07-16 |
Attorney, Agent or Firm:
Satoshi Omori