Title:
ガスパージ装置及び該ガスパージ装置を有するロードポート装置
Document Type and Number:
Japanese Patent JP5842628
Kind Code:
B2
Inventors:
Atsushi Emoto
Satoshi Abe
Satoshi Abe
Application Number:
JP2012012731A
Publication Date:
January 13, 2016
Filing Date:
January 25, 2012
Export Citation:
Assignee:
tdk Corporation
International Classes:
H01L21/677
Domestic Patent References:
| JP2009038073A | ||||
| JP2004235516A | ||||
| JP4541232B2 | ||||
| JP59033897A | ||||
| JP2011230887A | ||||
| JP2010270823A | ||||
| JP6501815A | ||||
| JP2003168727A |
Foreign References:
| WO2005124853A1 | ||||
| US20030141217 |
Attorney, Agent or Firm:
Okabe
Shinichi Usui
Takao Ochi
Koji Yoshizawa
Masami Saito
Shinichi Usui
Takao Ochi
Koji Yoshizawa
Masami Saito