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Title:
ＮｂＯ２焼結体及び該焼結体からなるスパッタリングターゲット並びにＮｂＯ２焼結体の製造方法
Document Type and Number:
Japanese Patent JP5845343
Kind Code:
B2
Inventors:
Narita Satoyasu
Application Number:
JP2014517068A
Publication Date:
January 20, 2016
Filing Date:
November 08, 2013
Export Citation:
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Assignee:
jx Nippon Mining & Metals Co., Ltd.
International Classes:
C04B35/00; C23C14/34
Domestic Patent References:
JP2012158493A2012-08-23
JP2002338354A2002-11-27
JP2012158493A2012-08-23
JP2002338354A2002-11-27
Foreign References:
CN101209927A2008-07-02
CN101209927A2008-07-02
Attorney, Agent or Firm:
Isamu Ogoshi
Ikki Kogoshi



 
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