Title:
プラズマ処理方法
Document Type and Number:
Japanese Patent JP5846851
Kind Code:
B2
Inventors:
Yoshiharu Inoue
Tetsuro Ono
Morimoto Unknown
Masaki Fujii
Miyachi Masakazu
Tetsuro Ono
Morimoto Unknown
Masaki Fujii
Miyachi Masakazu
Application Number:
JP2011232446A
Publication Date:
January 20, 2016
Filing Date:
October 24, 2011
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01L21/3065; H05H1/46
Domestic Patent References:
| JP6097087A | ||||
| JP1214122A | ||||
| JP11111677A | ||||
| JP2000306894A |
Attorney, Agent or Firm:
Manabu Inoue
Yuji Toda
Shigemi Iwasaki
Yuji Toda
Shigemi Iwasaki