Title:
薄膜蒸着装置及びこれを利用した有機発光表示装置の製造方法
Document Type and Number:
Japanese Patent JP5847437
Kind Code:
B2
Abstract:
A thin film deposition apparatus that may be precisely aligned with a substrate during a deposition process, and a method of manufacturing an organic light-emitting display device using the thin film deposition apparatus.
Inventors:
Yamitsu Yanagi
Cao Chang Mu Mu
Yasushi Satoshi
Cao Chang Mu Mu
Yasushi Satoshi
Application Number:
JP2011118686A
Publication Date:
January 20, 2016
Filing Date:
May 27, 2011
Export Citation:
Assignee:
Samsung Display Co.,Ltd.
International Classes:
H05B33/10; C23C14/24; H01L51/50
Domestic Patent References:
| JP2010116591A | ||||
| JP2009120946A | ||||
| JP2007507601A | ||||
| JP2004349101A | ||||
| JP2009520110A | ||||
| JP2007146219A | ||||
| JP2005293968A | ||||
| JP2004103269A | ||||
| JP2004137583A |
Attorney, Agent or Firm:
Nobuyuki Matsunaga
Tetsuji Tsuji
Hidekazu Miyoshi
Masakazu Ito
Tetsuji Tsuji
Hidekazu Miyoshi
Masakazu Ito