Title:
基板検査装置、基板検査方法および基板検査プログラム
Document Type and Number:
Japanese Patent JP5851200
Kind Code:
B2
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Inventors:
Daisuke Suzuki
Kenji Noguchi
Takayuki Murakoshi
Atsushi Teramoto
Kenji Noguchi
Takayuki Murakoshi
Atsushi Teramoto
Application Number:
JP2011235109A
Publication Date:
February 03, 2016
Filing Date:
October 26, 2011
Export Citation:
Assignee:
Nagoya Electric Industry Co., Ltd.
International Classes:
G01N23/04; G01N23/18
Domestic Patent References:
| JP2006162335A | ||||
| JP2005098867A |
Attorney, Agent or Firm:
Wataru Iwakami
Takatoshi Goto
Takatoshi Goto
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