Title:
金属膜表面の酸化防止方法及び酸化防止液
Document Type and Number:
Japanese Patent JP5852303
Kind Code:
B2
Inventors:
Atsushi Mizutani
Tadashi Inaba
Tomotake Takahashi
Kazutaka Takahashi
Tadashi Inaba
Tomotake Takahashi
Kazutaka Takahashi
Application Number:
JP2010208053A
Publication Date:
February 03, 2016
Filing Date:
September 16, 2010
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
C23F11/00; H01L21/301
Domestic Patent References:
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| JP2007189051A | ||||
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Attorney, Agent or Firm:
Toshizo Iida
Naosuke Miyamae
Naosuke Miyamae