Title:
液体試料加熱気化装置
Document Type and Number:
Japanese Patent JP5852774
Kind Code:
B2
Abstract:
The present invention is intended to improve response property and accuracy of temperature control of a liquid sample, and provided with: a vaporization tank 21 that retains the liquid sample; one or more heaters 22 that are provided in the vaporization tank 21 and respectively have heating parts 22h that come into contact with the liquid sample to heat the liquid sample; a temperature detection part that is provided with being in contact with an outer surface including the heating part 22h of any of the heaters 22 and detects a temperature of the outer surface; and a control part 25 that receives a temperature detection signal from the temperature detection part to control electric power supplied to the heaters 22.
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Inventors:
Hidenori Oba
Tadayuki Nagano
Tadayuki Nagano
Application Number:
JP2010159767A
Publication Date:
February 03, 2016
Filing Date:
July 14, 2010
Export Citation:
Assignee:
HORIBA STEC Co., Ltd.
International Classes:
B01J7/02; H01L21/205; H05B3/00
Domestic Patent References:
| JP2002336680A | ||||
| JP11319537A | ||||
| JP6231892U | ||||
| JP6161789U | ||||
| JP2001518600A |
Foreign References:
| US5078922 |
Attorney, Agent or Firm:
Ryuhei Nishimura
Akiko Sato
Saito Shindai
Akiko Sato
Saito Shindai