Title:
筐体カバー機構
Document Type and Number:
Japanese Patent JP5855428
Kind Code:
B2
Inventors:
Satoshi Okawara
Jun Sato
Jun Sato
Application Number:
JP2011248068A
Publication Date:
February 09, 2016
Filing Date:
November 11, 2011
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/304
Domestic Patent References:
| JP2009129993A | ||||
| JP7251133A | ||||
| JP2006339435A | ||||
| JP2004014839A | ||||
| JP60110194A | ||||
| JP8117704A | ||||
| JP10249289A | ||||
| JP2007181828A |
Attorney, Agent or Firm:
Hiroaki Sakai