Title:
静電誘導型電気機械変換素子およびナノピンセット
Document Type and Number:
Japanese Patent JP5855602
Kind Code:
B2
Abstract:
An electrostatic induced type electromechanical transducer includes: a first electrode having a plurality of first comb tooth electrodes; a second electrode having a plurality of second comb tooth electrodes arranged meshed with the plurality of first comb tooth electrodes through respective gaps; a plurality of dielectric members at an electric field formation space between the first comb tooth electrodes and the second comb tooth electrodes and made of a material having a relative dielectric constant greater than 1; and a base that fixedly supports or movably supports the first electrode, the second electrode, and the dielectric members, wherein the first electrode and/or the second electrode, and the dielectric members are capable of being relatively displaced from each other.
Inventors:
Hiroki Hayashi
Application Number:
JP2013108275A
Publication Date:
February 09, 2016
Filing Date:
May 22, 2013
Export Citation:
Assignee:
Aoi Electronics Co., Ltd.
International Classes:
H02N1/00
Domestic Patent References:
| JP5076186A | ||||
| JP2007276072A | ||||
| JP2013013256A |
Attorney, Agent or Firm:
Fuyuki Nagai
Sekine
Sekine