Title:
帯状シートの支持装置
Document Type and Number:
Japanese Patent JP5856398
Kind Code:
B2
Inventors:
Yoshiaki Sugishita
Application Number:
JP2011146380A
Publication Date:
February 09, 2016
Filing Date:
June 30, 2011
Export Citation:
Assignee:
LINTEC CORPORATION
International Classes:
H01L21/683
Domestic Patent References:
| JP2007261769A | ||||
| JP2009184742A |
Attorney, Agent or Firm:
Intellectual Property Office