Title:
マイクロリソグラフィ投影露光装置のための光学系
Document Type and Number:
Japanese Patent JP5861897
Kind Code:
B2
Inventors:
Daniel Kramer
Ingo Zenger
Ingo Zenger
Application Number:
JP2014052348A
Publication Date:
February 16, 2016
Filing Date:
March 14, 2014
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
G03F7/20; G02B5/30; G02B13/00; G02B19/00
Domestic Patent References:
| JP2005333001A | ||||
| JP2009508170A | ||||
| JP2011170366A |
Foreign References:
| WO2005041277A1 |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Yoshinori Kishi
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Yoshinori Kishi
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