Title:
ドライエッチング剤及びドライエッチング方法
Document Type and Number:
Japanese Patent JP5862012
Kind Code:
B2
Inventors:
Hibino Yasuo
Tomonori Umezaki
Kikuchi Akio
Isamu Mouri
Satoru Okamoto
Tomonori Umezaki
Kikuchi Akio
Isamu Mouri
Satoru Okamoto
Application Number:
JP2011011049A
Publication Date:
February 16, 2016
Filing Date:
January 21, 2011
Export Citation:
Assignee:
Central Glass Co., Ltd.
International Classes:
H01L21/3065; H01L21/768
Domestic Patent References:
| JP58078427A | ||||
| JP2008300616A | ||||
| JP2009206444A | ||||
| JP2002359229A | ||||
| JP2009206394A |
Foreign References:
| WO2005117082A1 | ||||
| US6174451 |
Attorney, Agent or Firm:
Makoto Koide