Title:
Ｘ線非破壊検査装置
Document Type and Number:
Japanese Patent JP5863101
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To measure a thickness dimension or the like of an object to be measured easily and at low cost by means of a simple device and arithmetic processing.SOLUTION: An article is created based on design information and includes a substrate of a known X-ray absorption coefficient and a measured target member of a known X-ray absorption coefficient different from that of the substrate. The article is irradiated with X-rays and the dosage of X-rays transmitted through the article is measured. An X-ray nondestructive inspection apparatus 10 comprises an X-ray source which irradiates the article with X-rays, a detector 60 which detects the dosage of X-rays transmitted through different two spots on the article at the two spots, a drive control section 30 which determines the different two spots on the article for the detection by the detector based on the design information and identifies the two spots as a pair of spots in such a manner that a difference between X-ray transmission paths at the different two spots on the article becomes a measured target when setting the spots, drive means 40 which moves the detector to the spots identified as a pair, and an arithmetic processing section 70 which calculates a thickness dimension of the measured target from the dosage of X-rays detected by the detector.
Inventors:
Masahiro Inoue
Masuo Yasuma
Yu Nakamura
Naozo Sugimoto
Toshihiko Nishizaki
Masuo Yasuma
Yu Nakamura
Naozo Sugimoto
Toshihiko Nishizaki
Application Number:
JP2011234639A
Publication Date:
February 16, 2016
Filing Date:
October 26, 2011
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
G01B15/02; G01B15/04
Domestic Patent References:
| JP9325022A | ||||
| JP2008267927A | ||||
| JP5021548A |
Foreign References:
| US6201850 |
Attorney, Agent or Firm:
Hiroaki Sakai
Naoki Yoshimura
Masafumi Miyao
Naoki Yoshimura
Masafumi Miyao